Overview
Compound molecular pump is composed of a turbomolecular pump and a drag pump. It combines the characteristics of a turbomolecular pump with a high pumping speed and high compression ratio when handling molecular flow, and a drag pump with a high pumping speed and high compression ratio at high pressures. This extends the application range of molecular pumps.The compound molecular pump is non-selective and exhibits no memory effects on the pumped gas. Due to its high compression ratio for gases with large molecular weights, it can achieve clean high vacuum and ultra-high vacuum without the need for a cold trap and oil baffle.
Features
● Oil-Free Clean Vacuum
● Achieves very low back pressure, reaching a high vacuum state.
● Higher pumping speed rapidly removes gases, accelerating the evacuation speed of the vacuum system.
● With virtually no moving parts internally, it results in lower noise and vibration, leading to lower maintenance costs.
Typical Applications
Electronics, metallurgy, chemical industry, scientific research, vacuum technology
Supporting Products

Product Parameter
Model |
TP-200 |
TP-600 |
TP-1200 |
TP-1600 |
Pumping rate (L/S) |
200 |
600 |
1200 |
1600 |
Pump body baking temperature (℃) |
< 80 |
< 100 |
< 120 |
< 120 |
Oil filling volume (ml) |
/ |
100 |
100 |
100 |
Pump weight (Kg) |
≈ 11 |
≈ 30 |
≈ 34 |
≈ 39 |
Installation direction |
Any angle |
Vertical ±5° |
Water cooling cooling water flow (L/min) |
/ |
1 |
Cooling water temperature (℃) |
/ |
≤ 25 |
Ambient temperature (℃) |
/ |
≤ 28 |
/ |
Cooling method |
Air cooling |
Water cooling |
It is recommended to use a backing pump (L/S) |
<2 |
4~8 |
8~15 |
15 |
Downtime (min) |
<6 |
<6 |
<7 |
<8.5 |
Start time (min) |
<6 |
<4 |
<5 |
<6 |
Vibration value (μm) |
≤ 0.1 |
Use bearings |
Imported ceramic bearings |
Rated speed(rpm) |
30000 |
24000 |
24000 |
24000 |
Front stage flange |
KF25 |
KF40 |
KF40 |
KF50 |
High vacuum flange |
KF40 |
Overall dimension (mm) |
208*152*266 |
265*236*457 |
294*267*467 |
327*296*467 |